Performance sic diodes

ABSTRACT

An embodiment relates to a semiconductor component, comprising a semiconductor body of a first conductivity type comprising a voltage blocking layer and islands of a second conductivity type on a contact surface and optionally a metal layer on the voltage blocking layer, and a first conductivity type layer comprising the first conductivity type not in contact with a gate dielectric layer or a source layer that is interspersed between the islands of the second conductivity type.

RELATED APPLICATIONS

This application is continuation-in-part (CIP) of U.S. patent application Ser. No. 16/777,928, filed on Jan. 31, 2020 (now U.S. Pat. No. 10,840,385), which is incorporated herein in its entirety by reference.

FIELD OF THE INVENTION

This invention relates to 4H—SiC devices, which include diodes and transistors having inter-digitated n-type and P-Type areas such as Junction Barrier Schottky (JBS) diodes, Merged PiN/Schottky (MPS) diodes, Metal oxide semiconductor field effect transistors (MOSFETs) and Junction field effect transistors (JFETs) having inter-digitated N-Type and P-Type areas.

BACKGROUND OF INVENTION

There has been a continuous trend toward higher operating frequencies especially in motor control and switch mode power supplies. In power supplies, operation at high frequencies is attractive because of the reduction in size and power losses in the passive components (inductors and capacitors) which leads to a more efficient, compact system design. To accomplish higher frequency operation, it is essential to use power transistors and rectifiers with improved switching performance. SiC's electronic parameters superiority would enable dramatic improvement in this regard.

FIG. 1 is the prior art structure of a MPS diode, consisting of interdigitated pin and Schottky diodes connected in parallel as reported in “T. Kimoto and J.A. Cooper, Fundamentals of Silicon Carbide Technology, IEEE Press (2014), page 296]”. The MPS diode as shown in the prior art in FIG. 1 has metal layer on top which forms ohmic contacts to the P+ regions and Schottky contacts to the n− regions, so the overall device consists of interdigitated Schottky and pin diodes connected in parallel. The P+ anode regions are spaced far enough apart that their depletion regions do not touch under zero or forward bias. This leaves a conductive path through the n− drift regions between each Schottky or non-Schottky contact and the N+ substrate. As forward bias is applied the Schottky or non-Schottky regions conduct first since the current density of the Schottky Barrier Diode is orders of magnitude higher than the pin diode at the same forward voltage. The Schottky or non-Schottky regions therefore effectively clamp the voltage drop across the pin regions and the pin regions do not conduct. As a result, virtually all of the forward current is due to electrons injected from the n− drift region through the Schottky or non-Schottky contact into the metal. Since the P+ regions do not inject holes into the drift region, no minority carrier charge is stored and the turn-off transient is fast, minimizing switching loss. With no conductivity modulation, the series resistance of the drift region is determined by its thickness and doping. This relatively high resistance leads to a voltage drop VDR that dominates the total voltage drop at high currents. In a Schottky diode, this poses a problem under high surge current events, since the pure Schottky diode can go into thermal runaway, with catastrophic consequences.

SUMMARY OF INVENTION

An embodiment relates to semiconductor component, comprising a semiconductor body of a first conductivity type comprising a voltage blocking layer (e.g., N−); and islands of a second conductivity type (e.g., P+) on a contact surface; and a metal layer on the voltage blocking layer, wherein the metal layer and the voltage blocking layer includes a Schottky contact, and a first conductivity type layer comprising the first conductivity type (e.g., N+) not in contact with the Schottky contact that is interspersed between the islands of the second conductivity type (e.g., P+).

In an embodiment, a vertical extent of the first conductivity type layer (e.g., N+) is lower than a bottom of the islands of the second conductivity type (e.g., P+).

In an embodiment, a vertical extent of the first conductivity type layer (e.g., N+) is higher than a bottom of the islands of the second conductivity type (e.g., P+).

In an embodiment, a doping concentration within the first conductivity type layer (e.g., N+) is non-uniform in a direction that is perpendicular to the Schottky contact (e.g., METAL 1).

In an embodiment, a vertical extent of the first conductivity type layer (e.g., N+) is lower than a bottom of the islands of the second conductivity type (e.g., P+).

In an embodiment, a vertical extent of the first conductivity type layer (e.g., N+) is higher than a bottom of the islands of the second conductivity type (e.g., P+).

In an embodiment, the first conductivity type layer (e.g., N+) has a doping concentration that does not vary in any direction along the contact surface.

In an embodiment, the first conductivity type layer (e.g., N+) has a first doping concentration that is higher than a second doping concentration of a drift region (e.g., N−).

In an embodiment, the first conductivity type layer (e.g., N+) has a first doping concentration that is lower than a second doping concentration of a drift region (e.g., N−).

In an embodiment, the Schottky contact comprises a metal comprising Al, Ag, Au, Mo, Ni, Pt, Ti, W, N, Ti_(x)W_(y), Ti_(x)N_(y), or combinations thereof.

An embodiment relates to a diode comprising P+ islands interspersed within a N+ region and a N− region contacts with a Schottky layer.

In an embodiment, a vertical extent of the N+ region is lower than a bottom of the P+ islands.

In an embodiment, a vertical extent of the N+ region is higher than a bottom of the P+ islands.

In an embodiment, a doping concentration within the N+ region is non-uniform in a direction that is perpendicular to the Schottky layer.

In an embodiment, a vertical extent of the N+ region is lower than a bottom of the P+ islands.

In an embodiment, a vertical extent of the N+ region is higher than a bottom of the P+ islands.

An embodiment relates to a diode comprising N+ islands interspersed within a P+ region and a P− region contacts with a Schottky layer.

In an embodiment, a vertical extent of the P+ region is lower than a bottom of the N+ islands.

In an embodiment, a vertical extent of the P+ region is higher than a bottom of the N+ islands.

In an embodiment, a doping concentration within the P+ region is non-uniform in a direction that is perpendicular to the Schottky layer.

In an embodiment, a vertical extent of the P+ region is lower than a bottom of the N+ islands.

In an embodiment, a vertical extent of the P+ region is higher than a bottom of the N+ islands.

A semiconductor component, comprising a semiconductor body of a first conductivity type comprising a voltage blocking layer, and islands of a second conductivity type on a contact surface, and a metal layer on the voltage blocking layer, and a first conductivity type layer comprising the first conductivity type not in contact with a gate dielectric layer or a source layer that is interspersed between the islands of the second conductivity type.

In an embodiment, the first conductivity type layer is a n-type layer and is formed in vertical direction such that it is completely enclosed by the voltage blocking layer which is a N drift layer.

In an embodiment, doping concentration of the n-type layer is higher than that of the voltage blocking layer which is a N-drift layer.

In an embodiment, doping concentration of the n-type layer is in a range of 1E15 cm⁻³ to 1E19 cm⁻³.

In an embodiment, the first conductivity type layer is a n-type layer and is not in contact with the gate dielectric layer and the second conductivity type which is a p-well region in a double-implanted MOSFET or a DMOSFET.

In an embodiment, structure of the DMOSFET comprising the second conductivity type which is a p-well region, the gate dielectric layer, the metal layer which is metal 1 layer on the voltage blocking layer which is N-Drift layer further comprises a N+ substrate, Gate Metal layer and an interspersed N+ and P+ regions forming a source ohmic contact regions.

In an embodiment, an inter-level dielectric or an ILD layer separates the Gate Metal from the metal 1 layer which contacts the source ohmic contact regions.

In an embodiment, the n-type layer vertical extent is greater than the vertical extent of the p-well region.

In an embodiment, the n-type layer vertical extent is smaller than the vertical extent of the p-well region.

In an embodiment, the n-type layer vertical extent is greater than the vertical extent of the p-well region, but lateral extent is smaller and is non-continuous or interrupted i.e. having gaps.

In an embodiment, the first conductivity type layer is a n-type layer and is not in contact with the source layer which is a N+ source layer and the second conductivity type which is a P+ gate region in a vertical junction field effect transistor (JFET).

In an embodiment, structure of the vertical junction field effect transistors (JFET) comprising the second conductivity type which is a P+ gate region, the N+ source, further comprises a N+ substrate, an interspersed source ohmic contact regions and a pad metallization layers which is a metal 1 layer.

In an embodiment, an inter-level dielectric or ILD layer separates the P+ gate region from the metal 1 layer which contacts the interspersed source ohmic contact regions.

In an embodiment, the n-type layer vertical extent is greater than the vertical extent of the P+ gate region.

In an embodiment, the n-type layer vertical extent is smaller than the vertical extent of the P+ gate region.

In an embodiment, the n-type layer vertical extent is greater than the vertical extent of the P+ gate region, but lateral extent is smaller and is non-continuous or interrupted i.e. having gaps.

A method comprising, preparing a silicon carbide wafer comprising a N-drift layer formed on top of a N+ substrate, and forming an n-type layer, wherein the n-type layer is formed such that it is completely buried within the N-drift layer.

In an embodiment, the n-type layer is formed using epitaxial growth, then it is to be followed by the growth of an additional n-type layer with the same doping concentration as the N-drift layer.

In an embodiment, the n-type layer is formed by ion-implantation, it may be formed using either Nitrogen or Phosphorus as a n-type implanted species.

In an embodiment, an implant energy may be in a range of 50 keV to 4 MeV and an implanted dose may be in a range of 1E10 cm⁻² to 1E14 cm⁻².

In an embodiment, steps for ion-implantation may be utilized to realize a p-well, a N+ source and a P+ regions for DMOSFET.

In an embodiment, the method further comprises steps which include a post-implantation annealing, a gate dielectric and a gate metal formation, a silicide formation for ohmic contacts, an ILD layer and a final pad metal layer deposition.

In an embodiment, steps for ion-implantation may be utilized to realize a P+ Gate, a N+ source regions for vertical JFET.

In an embodiment, the method further comprises steps which include a post-implantation annealing, a silicide formation for a gate and a source ohmic contacts, an ILD layer formation and a final pad metal layer deposition.

BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is the cross-sectional schematic of a prior-art SiC MPS diode.

FIG. 2A is an embodiment of MPS diode structure with buried N+ regions.

FIG. 2B the I-V characteristic for the embodiment described in FIG. 2A.

FIG. 2C is the comparison of the cross-sections of the devices in FIG. 2A.

FIGS. 3A to FIG. 3L are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 2A.

FIG. 4 is an embodiment of MPS diode structure where the bottom of the N+ region is higher than the bottom of the P+ region.

FIGS. 5A to FIG. 5 Lare cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 4.

FIG. 6A to FIG. 6F are embodiments of MPS diode structures with multiple N sub-regions, P sub-regions or both

FIG. 7AA to FIG. 7AL are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 6A.

FIG. 7BA to FIG. 7BL are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 6B.

FIG. 7EA to FIG. 7EL are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 6E.

FIG. 7FA to FIG. 7FL are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 6F.

FIG. 8 is an embodiment of MPS diode structure with two different types of P+ wells depending on their depths which are in comparison to the depth of the N+ layer

FIG. 9A to FIG. 9P are cross sectional views showing the process steps for manufacturing the SiC MPS diode shown in FIG. 8.

FIG. 10A is the blocking performances of the devices of this invention with varying ratio of W1/D1.

FIG. 10B is the blocking I-V curves of the devices of this invention with varying ratio of W1/D1.

FIG. 10C is the forward I-V curves of the devices of this invention with varying ratio of W1/D1.

FIG. 10D is the performance of differential specific on-resistances of the devices of this invention with varying ratio of W1/D1.

FIG. 11A shows the device structure of DMOSFET according to an embodiment.

FIG. 11B shows the device structure of junction field effect transistors (JFET) according to an embodiment

FIG. 12 shows an example of the n-type layer formed using ion-implantation according to an embodiment.

FIGS. 13A to 13C shows the N Layer vertical extent with respect to the P+ gate layer in a JFET according to various embodiments.

FIGS. 14A to 14C shows the N Layer vertical extent with respect to the p-well layer in a DMOSFET according to various embodiments.

FIGS. 15A to 15E a cross-sectional schematic of a vertical JFET showing the process steps for device shown in FIG. 11B.

FIGS. 16A to 16D a cross-sectional schematic of a power MOSFET structure showing the process steps for device shown in FIG. 11A.

DETAILED DESCRIPTION Definitions and General Techniques

Unless otherwise defined herein, scientific and technical terms used in connection with the present invention shall have the meanings that are commonly understood by those of ordinary skill in the art. Further, unless otherwise required by context, singular terms shall include pluralities and plural terms shall include the singular. Generally, nomenclatures used in connection with, and techniques of, semiconductor processing described herein are those well-known and commonly used in the art.

The methods and techniques of the present invention are generally performed according to conventional methods well known in the art and as described in various general and more specific references that are cited and discussed throughout the present specification unless otherwise indicated. The nomenclatures used in connection with, and the procedures and techniques of semiconductor device technology, semiconductor processing, and other related fields described herein are those well-known and commonly used in the art.

The following terms and phrases, unless otherwise indicated, shall be understood to have the following meanings.

The term “SiC” as used herein refers to silicon carbide which is a compound semiconductor and is a mixture of silicon and carbon with the chemical formula SiC. Silicon is covalently bonded with carbon. In 4H—SiC, 4H is written in the Ramsdell classification scheme where the number indicates the layer and the letter indicates the Bravais lattice. That means in a 4H—SiC structure four hexagonal layers of SiC are present. SiC exists in a kind of polymorphic crystalline building known as a polytype, e.g. 3C-SiC, 4H—SiC, 6H—SiC. Presently 4H—SiC is used in power device manufacturing.

The term “substrate” as used herein refers to the supporting material on or in which the components of an integrated circuit are fabricated or attached.

The term “MPS” as used herein refers to merged-PiN Schottky (MPS) diodes which consists of inter-digitated Schottky and P+ implanted areas.

The term “JFET” as used herein refers to junction gate field-effect transistor which is a three-terminal semiconductor device that can be used as electronically-controlled switches, amplifiers, or voltage-controlled resistors. A FET (field-effect transistor) is a unipolar transistor in which current carriers are injected at a source terminal and pass to a drain terminal through a channel of semiconductor material whose conductivity depends largely on an electric field applied to the semiconductor from a control electrode. There are two main types of FETs, a junction FET and an insulated-gate FET. In the junction FET, the gate is isolated from the channel by a PN-junction. In an insulated-gate FET, the gate is isolated from the channel by an insulating layer so that the gate and channel form a capacitor with the insulating layer as the capacitor dielectric.

The term “dopant” as used herein refers to an impurity added from an external source to a material by diffusion, coating, or implanting into a substrate, and changing the properties thereof. In semiconductor technology, an impurity may be added to a semiconductor to modify its electrical properties or to a material to produce a semiconductor having desired electrical properties. n-type (negative) dopants (e.g., such as phosphorus for a group IV semiconductor) typically come from group V of the periodic table. When added to a semiconductor, n-type dopants create a material that contains conduction electrons. p-type (positive) dopants (e.g., such as boron for a group IV semiconductor) typically come from group III and result in conduction holes (i.e., vacancies in the electron shells).

The term “drain” as used herein refers to the electrode of a field effect transistor which receives charge carriers which pass through the transistor channel from the source electrode.

The term “source” as used herein refers to the active region/electrode to which the source of charge carriers is connected in a field effect transistor.

The term “gate” as used herein refers to the control electrode or control region that exerts an effect on a semiconductor region directly associated therewith, such that the conductivity characteristic of the semiconductor region is altered in a temporary manner, often resulting in an on-off type switching action. The control electrode or control region of a field effect transistor is located between the source and drain electrodes, and regions thereof.

The term “PN junction” as used herein refers to the interface and region of transition between p-type and n-type semiconductors.

The term “P-type” as used herein refers to extrinsic semiconductor in which the hole density exceeds the conduction electron density.

The term “contact” as used herein refers to the point or part of a conductor which touches another electrical conductor or electrical component to carry electrical current to or from the conductor or electrical component.

The term “drift layer” as used herein refers to the region that determines the reverse breakdown voltage of the diode. Its function is to absorb the depletion layer of the reverse biased P+ N− junction. As it is lightly doped, it will add significant ohmic resistance to the diode when it is forward biased.

The term “device” as used herein refers to the physical realization of an individual electrical element in a physically independent body which cannot be further divided without destroying its stated function.

The term “surface” as used herein refers to the outer or exterior boundary of a thing.

The term “mobility” as used herein refers to the facility with which carriers move through a semiconductor when subjected to an applied electric field. Electrons and holes typically have different mobilities in the same semiconductor.

The term “RIE” as used herein refers to reactive ion etching which is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than wet etching. RIE uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High-energy ions from the plasma attack the wafer surface and react with it.

The term “CVD” as used herein refers to chemical vapor deposition is method used to produce high quality, high-performance, solid materials, typically under vacuum. The process is often used in the semiconductor industry to produce thin films. In typical CVD, the wafer (substrate) is exposed to one or more volatile precursors, which react and/or decompose on the substrate surface to produce the desired deposit. Frequently, volatile by-products are also produced, which are removed by gas flow through the reaction chamber.

The term “PECVD” as used herein refers to plasma-enhanced chemical vapor deposition process used to deposit thin films from a gas state (vapor) to a solid state on a substrate. Chemical reactions are involved in the process, which occur after creation of a plasma of the reacting gases.

The term “LPCVD” as used herein refers to low pressure chemical vapor deposition technology that uses heat to initiate a reaction of a precursor gas on the solid substrate. This reaction at the surface is what forms the solid phase material.

The term “CMP” as used herein refers to chemical-mechanical polishing (CMP) which is a polishing process assisted by chemical reactions to remove surface materials. CMP is a standard manufacturing process practiced at the semiconductor industry to fabricate integrated circuits and memory disks.

The term “RTA” as used herein refers to rapid thermal anneal which is a process used in semiconductor device fabrication. It consists of heating a single wafer at a time in order to affect its electrical properties. Unique heat treatments are designed for different effects. Wafers can be heated in order to activate dopants, change film-to-film or film-to-wafer substrate interfaces, densify deposited films, change states of grown films, repair damage from ion implantation, move dopants or drive dopants from one film into another or from a film into the wafer substrate. RTA are performed by equipment that heats a single wafer at a time using either lamp based heating, a hot chuck, or a hot plate that a wafer is brought near. Unlike furnace anneals they are short in duration, processing each wafer in several minutes.

The terms “first conductivity type region” and “second conductivity type region” used herein, describe n-type and p-type regions respectively for a n-type device. For a p-type device “first conductivity type region” and “second conductivity type region” are used to describe p-type and n-type regions respectively.

The term “I-V Characteristic Curves” used herein refers to Current-Voltage Characteristic Curves or simply I-V curves of an electrical device or component, refers to a set of graphical curves which are used to define its operation within an electrical circuit.

The term “MV/cm” as used here in refers to Megavolt per centimeter and refers to unit of electric field.

The term “well” used herein refers certain regions in a metal-oxide-semiconductor (MOS) transistor. MOS transistors are always created in a “well” region. A PMOS (positive-channel MOS) transistor is made in an N-doped region, called “n-well” region. Similarly, an NMOS transistor (negative-channel MOS) is made in a “P-type” region called “P-well”. This ensures that the leakage between two transistors, through the bottom side, is low due to the reverse bias between the transistor areas and the well region.

The term “plus” used herein refers certain regions in a metal-oxide-semiconductor (MOS) transistor where doping concentration is excessive.

The term “MOSFET” as used herein refers to metal oxide semiconductor field-effect transistor. which is a four-terminal device with source (S), gate (G), drain (D) and body (B) terminals. The body of the MOSFET is frequently connected to the source terminal so making it a three-terminal device like field effect transistor.

The term “DMOSFET” as used herein refers to double-implantation metal oxide semiconductor field-effect transistor. A common physical structure of SiC MOSFETs is the planar double-implanted MOSFET in 4H—SiC (SiC-DMOSFET).

The term “source interconnect metallization” as used herein refers to interconnection metallization that interconnects many DMOSFETs using fine-line metal patterns.

The term “dielectric” as used herein refers to a non-conductor of electricity, otherwise known as an insulator.

The term “ILD” as used herein refers to interlayer dielectric material used to electrically separate closely spaced interconnect lines arranged in several levels (multilevel metallization) in an advanced integrated circuit.

The term “substrate” as used herein refers to the supporting material on or in which the components of an integrated circuit are fabricated or attached.

The terms “first conductivity type region” and “second conductivity type region” as used herein, are used to describe n-type and p-type regions respectively for a n-type device. For a p-type device “first conductivity type region” and “second conductivity type region” are used to describe p-type and n-type regions respectively.

The embodiments described herein relate to SiC transistors

The device described in an embodiment herein has a buried N+ region, which is located in between that P+ islands. The buried N+ region is formed in a way that it is physically separated from the wafer surface because it does not contact the Schottky layer. There is a portion of the N-drift layer in contact with the Schottky surface. The physical separation of the N+ region from the wafer surface is a critical feature of this embodiment since SiC devices at the Schottky metal have the N− doping concentration, not the N+ doping concentration. The silicon carbide surfaces in contact with a Schottky metal has the N− doping concentration which is critical for reducing the strength of the electric field at the Schottky metal interface with the SiC. In an embodiment described herein, the vertical extent of the buried N+ region is lower than the bottom of the P+ region and covers the bottom of the P+ region. The spacing between the P+ islands is narrower and the depth of the P+ islands is deeper when compared to prior art MPS diodes. The presence of the N+ region allows the spacing between the P+ islands to be narrower. The P+ islands shield the electric field that develops during the high voltage operation from the Schottky interface. In the embodiments herein the P+ regions interspersed with the N+ regions are designed such as to achieve a certain level of charge balance between the P+ islands and N+ regions which provides the benefit of further reducing the ON resistance of this device and also keeping a low electric field.

In an embodiment herein, the bottom of the N+ region is higher than the bottom of the P+ region. The bottom of the P+ region is in contact with the N− drift layer which is a trade off as this will enable lower leakage currents but higher ON resistance. Better ON resistance can be achieved in an embodiment of the device where the N+ region located in between the P+ islands is buried while lower leakage currents can be achieved in an embodiment of the device where the N+ region does not enclose the bottom of the P+ islands completely. In an embodiment described herein, both buried N+ region located in between the P+ islands and N+ region that do not enclose the bottom of the P+ islands completely can exist on the same device.

In an embodiment described herein the N+ region is formed of several sub N regions while the P+ is formed of many sub P regions such that the doping concentration in each of these different layers or slices could be different. In an embodiment herein either the final slice of the N+ region is underneath the P+ islands and covers around the P+ islands completely or the bottom of the N+ slice is higher than the bottom of the P+ region. The doping concentration of N+ types sub regions farther away from the silicon carbide surface could be progressively higher which may have a benefit of lower conduction losses. In another implementation the doping concentration of the p-type sub regions farther away from the SiC surface could be made progressively lower which may enable better blocking characteristics. The varying doping concentration described in the embodiments herein allows freedom to appropriately tune the device design towards a lower leakage currents, better conduction losses, lowered resistance etc. Better trade off can be achieved with layered and differently doped N+ and P+ regions as opposed to just having one P+ layer and one N+ layer and this can be achieved by using multiple ion implantation steps or multiple epi growth.

In an embodiment herein the N+ region which is interspersed between a set of multiple P+ wells is formed in such a way that it is physically separated from the wafer surface and extends all the way into the N− drift region. The physical separation of the N+ region from a SiC wafer surface in the embodiments herein distinguishes it from other similar inventions.

In an embodiment herein, a part of the SiC wafer which is in contact with a Schottky metal (METAL 1) and is an n-type semiconductor has the same doping concentration of the N− drift since the doping concentration of the n-type SiC semiconductor which is in direct contact with the Schottky metal (METAL 1) is critical for reducing the strength of the electric field at the wafer surface, during the high-voltage blocking mode of operation of the SiC MPS diode.

The device of embodiment shown in FIG. 2A is the cross-sectional schematic of SiC MPS diode. The key regions of this device are an N+ substrate 201 at the bottom which gives mechanical support of the wafer and is ˜350 μm-thick. An N− drift region 202 which is usually an epi layer and is on top of the N+ substrate. There are multiple P+ wells 204 that are formed as linear stripes or more complex circular or hexagonal patterns. The device has a first metal layer 205 denoted as METAL 1, which is the Schottky metal to an n-type SiC semiconductor region and forms Schottky contact to its underlying n-type regions. The device has a second metal layer 206 denoted as METAL 2 on the front side of the wafer which is in contact with the METAL 1. METAL 2 is often called “power metal” and is usually in Aluminum. There is a silicide layer 207 under the bottom of the N+ substrate. There is a third metal layer 208 denoted as METAL 3 under the back side of the wafer which is in contact with the silicide layer.

The device shown in FIG. 2A has a N+ region 203 which is interspersed between a set of multiple P+ wells 204. The N+ region 203 is formed in such a way that it is physically separated from the wafer surface and extends all the way into the N− drift region 202. The physical separation of the N+ region from a SiC wafer surface is a critical feature of the embodiment described herein and distinguishes it from other similar inventions. A part of the SiC wafer which is in contact with a Schottky metal 205 denoted as METAL 1 and is an n-type semiconductor has the same doping concentration of the N− drift 202. In the embodiment described herein, the doping concentration of the n-type SiC semiconductor which is in direct contact with the Schottky metal 205 labeled METAL 1 is critical for reducing the strength of the electric field at the wafer surface, during the high-voltage blocking mode of operation of the SiC MPS diode. The vertical extent of the N+ region 203 is lower than the bottom of the P+ region 204. The buried N+ region completely surrounds the P+ region which provides Schottky-injected majority carriers a more conductive travel path and reduces the total forward conduction loss.

The embodiment described in the device herein, uses a different kind of Schottky metal for the METAL 1 layer when comparing to the METAL 1 of the prior art. The choice of METAL 1 205 of the device described in FIG. 2A is made so that the barrier height of its Schottky contact is lower than that of the prior art's. Due to the smaller Schottky barrier height, the injection of the majority carrier over the Schottky barrier becomes more efficient and this reflects as a lower Knee Voltage (V_(Knee)) in the forward I-V characteristics as shown in FIG. 2B. The new devices with lower V_(Knee) (marked as #2 and #3) have lower forward conduction loss than their counterpart (marked as #1). The lower Schottky barrier height, leads to higher reverse leakage current as shown in the reverse I-V curves—marked as #2 and #3. The amount of the leakage current can be kept under control in the embodiment described here by fine tuning the barrier height which is dependent on various design elements including but not limited to the annealing temperature of the Schottky contact, the pitch of the device, depth and doping of the P+ region, the doping and depth of the N+ region, and the doping of the N− drift region.

Another distinct feature of the embodiment described here is that the N+ substrate of the new device is thinner (which is usually 100˜200 μm) than its counterpart (which is usually ˜350 μm). The thinned N+ substrate directly impacts on the forward I-V characteristics that the linear region of the forward I-V curves where V_(F)>V_(Knee) becomes steeper because the thinned substrate contributes less series resistance to the total amount of the forward conduction loss. As shown in FIG. 2B, the diode with the lower V_(Knee) and thinned substrate (marked #3) must have less conduction loss than another diode with the exact lower V_(Knee) and thick substrate (marked #2). In the embodiment here the Differential On-Resistance (R_(ON,Diff)) which is the inverse of the slope of the linear segment of the forward I-V curve is significantly reduced by thinning the N+ substrate. The lower V_(Knee) and R_(ON,Diff) of the diode in the embodiment herein enables significant reduction of the forward conduction loss while maintaining the reverse leakage low enough for suitable needs in the market.

FIG. 3A to FIG. 3L describes the process of manufacturing the structure shown in FIG. 2A. The manufacturing process of the device includes preparing a SiC wafer in FIG. 3A which consists of a highly conductive N+ substrate 301 and an N− drift region 302, where the N− drift region is typically epi-grown. The N− drift region 302 is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, an ion implantation step with an n-type species 303 such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 3B forming an N+ region within the N− drift region. The edge termination which is not shown needs to be masked during the n-type ion implantation step. It is important to note that the n-type ion implantation step 303 needs to be performed in such a fashion that the N+ region 304 is completely buried inside the N− drift region in FIG. 3C. The ion implantation step should form the N+ region 304 where the top of the N+ region is physically off from the wafer surface.

A patterned mask 305, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 3D. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 306 such as aluminum and/or boron is performed in FIG. 3E to form a set of multiple P+ wells 307 in FIG. 3F. The bottoms of the set of multiple P+ wells 307 are formed such that they are above the bottom of the N+ region 304. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 3F. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 305 is removed by dry or wet etching process in FIG. 3G. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 308 marked as METAL 1 directly on the wafer surface in FIG. 3H. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA (Rapid Thermal Anneal). The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 309 marked as METAL 2 is then deposited on top of the wafer in FIG. 3I and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 3J. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by Chemical Mechanical Polishing (CMP), wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 310 on the back side of the wafer is then formed in FIG. 3K. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 311 marked as METAL 3 is formed on the back side of the wafer in FIG. 3L. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of three n-type epi-grown layers in FIG. 3C with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. The three n-type epi-grown layers should be formed in such a way that an N− layer 302 is meeting a device side of the wafer and an N+ layer 304 is positioned right underneath the N− layer, where the N+ layer is on top of a second N− layer also labeled 302 which serves as a drift region and the second N− layer is positioned on top of the N+ substrate 301.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 305, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 3D. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 306 such as aluminum and/or boron is performed in FIG. 3E to form a set of multiple P+ wells 307 in FIG. 3F. The bottoms of the set of multiple P+ wells 307 are formed such that they are above the bottom of the N+ region 304. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 3F. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 305 is removed by dry or wet etching process in FIG. 3G. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 308 marked as METAL 1 directly on the wafer surface in FIG. 3H. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 309 marked as METAL 2 is then deposited on top of the wafer in FIG. 3I and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 3J. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 310 on the back side of the wafer is then formed in FIG. 3K. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 311 marked as METAL 3 is formed on the back side of the wafer in FIG. 3L. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

As seen in the embodiment shown in FIG. 2A the P+ region 204 of the SiC MPS diode of this invention is formed in such a way that the set of multiple P+ wells are spaced narrower in lateral direction and extend vertically deeper into the N− drift region 202 when compared to the case of the prior art. The P+ region of this invention, in conjunction with the aforementioned N+ region, is designed to provide a robust shielding to the Schottky barrier formed on the wafer surface. In contrast, the device of the prior art is vulnerable to the high stress of the electric field at its Schottky contact which easily results in temporary/permanent degradation of the Schottky contact leading to the high leakage current and/or irreversible destruction of the device. The device in the prior art has the N− drift region as the sole conduction path only, and it is clear that the majority carriers flowing through the JFET-like region between the P+ wells near the wafer surface will suffer in the carrier transport and increase the total forward conduction loss.

FIG. 2C compares key dimensions of the device structure of this invention. Regardless of the types of the devices, the lateral spacing between two adjacent P+ wells is defined to be W1 and the vertical depth of the P+ wells measured from the surface of the SiC wafer is defined to be Dl. It should be noted that the ratio of W1 over D1 (or W1/D1) for the device of this invention is less than 3.0 (or W1/D1<3.0).

The device of embodiment shown in FIG. 4 is the cross-sectional schematic of SiC MPS diode. The key regions of this device are an N+ substrate 401 at the bottom which gives mechanical support of the wafer and is ˜350 μm-thick. An N− drift region 402 which is usually an epi layer and is on top of the N+ substrate. There are multiple P+ wells 404 that are formed as linear stripes or more complex circular or hexagonal patterns. The device has a first metal layer 405 denoted as METAL 1, which is the Schottky metal to an n-type SiC semiconductor region and forms Schottky contact to its underlying n-type regions. The device has a second metal layer 406 denoted as METAL 2 on the front side of the wafer which is in contact with the METAL 1. METAL 2 is often called “power metal” and is usually in Aluminum. There is a silicide layer 407 under the bottom of the N+ substrate. There is a third metal layer 408 denoted as METAL 3 under the back side of the wafer which is in contact with the silicide layer.

The device shown in FIG. 4 has a N+ region 403 which is interspersed between a set of multiple P+ wells 404. The N+ region 403 is formed in such a way to extend near the vicinity of the P+ region 404 but not completely cover the bottom of the P+ region. The physical separation of the N+ region from a SiC wafer surface is a critical feature of the embodiment described herein and distinguishes it from other similar inventions. A part of the SiC wafer which is in contact with a Schottky metal 405 denoted as METAL 1 and is an n-type semiconductor has the same doping concentration of the N− drift 402. In the embodiment described herein, the doping concentration of the n-type SiC semiconductor which is in direct contact with the Schottky metal 405 labeled METAL 1 is critical for reducing the strength of the electric field at the wafer surface, during the high-voltage blocking mode of operation of the SiC MPS diode. The vertical extent of the N+ region 403 is above the bottom of the P+ region 404. The buried N+ region does not completely cover the bottom of the P+ region.

FIG. 5A to FIG. 5L describes the process of manufacturing the structure shown in FIG. 4. The manufacturing process of the device includes preparing a SiC wafer in FIG. 5A which consists of a highly conductive N+ substrate 501 and an N− drift region 502, where the N− drift region is typically epi-grown. The N− drift region 502 is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, an ion implantation step with an n-type species 503 such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 5B forming an N+ region within the N− drift region. The edge termination which is not shown needs to be masked during the n-type ion implantation step. It is important to note that the n-type ion implantation step 503 needs to be performed in such a fashion that the N+ region 504 is completely buried inside the N− drift region in FIG. 5C. The ion implantation step should form the N+ region 504 where the top of the N+ region is physically off from the wafer surface.

A patterned mask 505, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 5D. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 506 such as aluminum and/or boron is performed in FIG. 5E to form a set of multiple P+ wells 507 in FIG. 5F. The bottoms of the set of multiple P+ wells 507 are formed such that they are below the bottom of the N+ region 504. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 5F. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 505 is removed by dry or wet etching process in FIG. 5G. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 508 marked as METAL 1 directly on the wafer surface in FIG. 5H. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 509 marked as METAL 2 is then deposited on top of the wafer in FIG. 5I and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 5J. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 510 on the back side of the wafer is then formed in FIG. 5K. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 511 marked as METAL 3 is formed on the back side of the wafer in FIG. 5L. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of three n-type epi-grown layers in FIG. 5C with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. The three n-type epi-grown layers should be formed in such a way that an N− layer 502 is meeting a device side of the wafer and an N+ layer 504 is positioned right underneath the N− layer, where the N+ layer is on top of a second N− layer also labeled 502 which serves as a drift region and the second N− layer is positioned on top of the N+ substrate 501.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 505, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 5D. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 506 such as aluminum and/or boron is performed in FIG. 5E to form a set of multiple P+ wells 507 in FIG. 5F. The bottoms of the set of multiple P+ wells 507 are formed such that they are below the bottom of the N+ region 504. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 5F. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 505 is removed by dry or wet etching process in FIG. 5G. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 508 marked as METAL 1 directly on the wafer surface in FIG. 5H. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 509 marked as METAL 2 is then deposited on top of the wafer in FIG. 5I and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 5J. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 510 on the back side of the wafer is then formed in FIG. 5K. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 511 marked as METAL 3 is formed on the back side of the wafer in FIG. 5L. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

The embodiment shown in FIG. 4 affords lower leakage current and better blocking performance than embodiment shown in FIG. 2A, by further reducing the electrical field at the Schottky metal interface, but may trade-off a higher on-state voltage drop as compared to the embodiment shown in FIG. 2A.

The devices of embodiments shown in FIG. 6A to FIG. 6F are the cross-sectional schematic of SiC MPS diode. The key regions of these device are an N+ substrate 601 at the bottom which gives mechanical support of the wafer and is ˜350 μm-thick. An N− drift region 602 which is usually an epi layer and is on top of the N+ substrate. The device has a first metal layer 605 denoted as METAL 1, which is the Schottky metal to an n-type SiC semiconductor region and forms Schottky contact to its underlying n-type regions. The device has a second metal layer 606 denoted as METAL 2 on the front side of the wafer which is in contact with the METAL 1. METAL 2 is often called “power metal” and is usually in Aluminum. There is a silicide layer 607 under the bottom of the N+ substrate. There is a third metal layer 608 denoted as METAL 3 under the back side of the wafer which is in contact with the silicide layer. The devices of embodiments in FIG. 6A to FIG. 6F differs from the ones shown in embodiments FIG. 2A and FIG. 4 because the N+ region in the previous embodiments is replaced by a set of multiple N sub-regions 603 arranged in layers. The thickness and doping concentration in each of these sub-regions may be different. Similarly the P+ region of devices in embodiments of FIG. 2A and FIG. 4 is replaced by a set of multiple layered P sub-regions. The doping concentration in each slice may be preferably designed.

The devices in embodiments shown in FIG. 6A to FIG. 6F have the N+ region 603 which is interspersed between a set of multiple P+ wells 604. There are several potential examples of the embodiment shown in FIG. 6A to FIG. 6F including a device with a set of multiple n-type sub-layers with different thicknesses and doping concentrations but a set of multiple p-type wells which are of the same kind as in FIG. 6A and FIG. 6B, a device with a set of multiple p-type sub-layers with different thicknesses and doping concentrations but a single n-type layer serving as the N+ region as in FIG. 6C and FIG. 6D, a device with a set of multiple n-type sub-layers and a set of multiple p-type sub-layers with different thicknesses and doping concentrations as in FIG. 6E and FIG. 6F. Devices in FIG. 6A, FIG. 6C and FIG. 6E have the N+ region 603 surrounding and under the P+ wells 604, and devices in FIG. 6Bb, FIG. 6D and FIG. 6F have the N+ region 603 placed in between the P+ wells but not surrounding the P+ wells 604. The physical separation of the N+ region from a SiC wafer surface is a critical feature of the embodiment described herein and distinguishes it from other similar inventions. A part of the SiC wafer which is in contact with a Schottky metal 605 denoted as METAL 1 and is an n-type semiconductor has the same doping concentration of the N− drift 602. In the embodiment described herein, the doping concentration of the n-type SiC semiconductor which is in direct contact with the Schottky metal 605 labeled METAL 1 is critical for reducing the strength of the electric field at the wafer surface, during the high-voltage blocking mode of operation of the SiC MPS diode.

FIG. 7AA to FIG. 7AL describes the process of manufacturing the structure shown in FIG. 6A. The manufacturing process of the device includes preparing a SiC wafer in FIG. 7AA which consists of a highly conductive N+ substrate 701 a and an N− drift region 702 a, where the N− drift region is typically epi-grown. The N− drift region 702 a is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, a set of multiple ion implantation steps with an n-type species 703 a such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 7AB. The set of multiple ion implantation steps with the n-type species forms a set of sub n-type regions 704 a in FIG. 7AC where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The interconnected sub regions consist of the N+ region as a whole. The edge termination which is not shown needs to be masked during the set of n-type ion implantation steps. It is important to note that the n-type ion implantation steps 703 a needs to be performed in such a fashion that the N+ region 704 a is completely buried inside the N− drift region in FIG. 7AC. The ion implantation steps should form the N+ region 704 a where the top of the N+ region is physically off from the wafer surface.

A patterned mask 705 a, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7AD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 706 a such as aluminum and/or boron is performed in FIG. 7AE to form a set of multiple P+ wells 707 a in FIG. 7AF. The bottoms of the set of multiple P+ wells 707 a are formed such that they are above the bottom of the N+ region 704 a. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7AF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 a is removed by dry or wet etching process in FIG. 7AG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 a marked as METAL 1 directly on the wafer surface in FIG. 7AH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 a marked as METAL 2 is then deposited on top of the wafer in FIG. 7AI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7AJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 a on the back side of the wafer is then formed in FIG. 7AK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 a marked as METAL 3 is formed on the back side of the wafer in FIG. 7AL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of multiple n-type epi-grown layers in FIG. 7AC with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. On top of the N+ substrate 701 a, an N− drift layer 702 a can be epi-grown for serving as a drift/blocking layer. On top of the N− drift layer, a number of n-type epilayers can be grown to form an N+ region 704 a as a whole which consists of a set of sub n-type regions where each sub region is defined by different doping concentration and thickness and all sub regions are interconnected. On top of the buried N+ region, an N− layer can be formed which reaches to the surface of the SIC wafer 702 a.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 705 a, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7AD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 706 a such as aluminum and/or boron is performed in FIG. 7AE to form a set of multiple P+ wells 707 a in FIG. 7AF. The bottoms of the set of multiple P+ wells 707 a are formed such that they are above the bottom of the N+ region 704 a. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7AF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 a is removed by dry or wet etching process in FIG. 7AG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 a marked as METAL 1 directly on the wafer surface in FIG. 7AH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 a marked as METAL 2 is then deposited on top of the wafer in FIG. 7AI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7AJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 a on the back side of the wafer is then formed in FIG. 7AK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 a marked as METAL 3 is formed on the back side of the wafer in FIG. 7AL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

FIG. 7BA to FIG. 7BL describes the process of manufacturing the structure shown in FIG. 6B. The manufacturing process of the device includes preparing a SiC wafer in FIG. 7BA which consists of a highly conductive N+ substrate 701 b and an N− drift region 702 b, where the N− drift region is typically epi-grown. The N− drift region 702 b is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, a set of multiple ion implantation steps with an n-type species 703 b such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 7BB. The set of multiple ion implantation steps with the n-type species forms a set of sub n-type regions 704 b in FIG. 7BC where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The interconnected sub regions consist of the N+ region as a whole. The edge termination which is not shown needs to be masked during the set of n-type ion implantation steps. It is important to note that the n-type ion implantation steps 703 b needs to be performed in such a fashion that the N+ region 704 b is completely buried inside the N− drift region in FIG. 7BC. The ion implantation steps should form the N+ region 704 b where the top of the N+ region is physically off from the wafer surface.

A patterned mask 705 b, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7BD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 706 b such as aluminum and/or boron is performed in FIG. 7BE to form a set of multiple P+ wells 707 b in FIG. 7BF. The bottoms of the set of multiple P+ wells 707 b are formed such that they are below the bottom of the N+ region 704 b. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7BF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 b is removed by dry or wet etching process in FIG. 7BG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 b marked as METAL 1 directly on the wafer surface in FIG. 7BH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 b marked as METAL 2 is then deposited on top of the wafer in FIG. 7BI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7BJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 b on the back side of the wafer is then formed in FIG. 7BK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 b marked as METAL 3 is formed on the back side of the wafer in FIG. 7BL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of multiple n-type epi-grown layers in FIG. 7BC with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. On top of the N+ substrate 701 b, an N− drift layer 702 b can be epi-grown for serving as a drift/blocking layer. On top of the N− drift layer, a number of n-type epilayers can be grown to form an N+ region 704 b as a whole which consists of a set of sub n-type regions where each sub region is defined by different doping concentration and thickness and all sub regions are interconnected. On top of the buried N+ region, an N− layer can be formed which reaches to the surface of the SIC wafer 702 b.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 705 b, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7BD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A p-type ion implantation step with a p-type impurity 706 b such as aluminum and/or boron is performed in FIG. 7BE to form a set of multiple P+ wells 707 b in FIG. 7BF. The bottoms of the set of multiple P+ wells 707 b are formed such that they are below the bottom of the N+ region 704 b. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7BF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 b is removed by dry or wet etching process in FIG. 7BG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 b marked as METAL 1 directly on the wafer surface in FIG. 7BH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 b marked as METAL 2 is then deposited on top of the wafer in FIG. 7BI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7BJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 b on the back side of the wafer is then formed in FIG. 7BK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 b marked as METAL 3 is formed on the back side of the wafer in FIG. 7BL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

FIG. 7EA to FIG. 7EL describes the process of manufacturing the structure shown in FIG. 6E. The manufacturing process of the device includes preparing a SiC wafer in FIG. 7EA which consists of a highly conductive N+ substrate 701 e and an N− drift region 702 e, where the N− drift region is typically epi-grown. The N− drift region 702 e is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, a set of multiple ion implantation steps with an n-type species 703 e such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 7EB. The set of multiple ion implantation steps with the n-type species forms a set of sub n-type regions 704 e in FIG. 7EC where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The interconnected sub regions consist of the N+ region as a whole. The edge termination which is not shown needs to be masked during the set of n-type ion implantation steps. It is important to note that the n-type ion implantation steps 703 e needs to be performed in such a fashion that the N+ region 704 e is completely buried inside the N− drift region in FIG. 7EC. The ion implantation steps should form the N+ region 704 e where the top of the N+ region is physically off from the wafer surface.

A patterned mask 705 e, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7ED. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A set of multiple ion implantation steps with a p-type impurity 706 e such as aluminum and/or boron is performed in FIG. 7EE to form a set of multiple P+ wells 707 e in FIG. 7EF. The set of multiple ion implantation steps with the p-type species forms a set of sub p-type regions 707 e in FIG. 7EF where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The P+ region 707 e is formed by multiple P sub-regions. The bottoms of the set of multiple P+ wells 707 e are formed such that they are above the bottom of the N+ region 704 e. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7EF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 e is removed by dry or wet etching process in FIG. 7EG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 e marked as METAL 1 directly on the wafer surface in FIG. 7EH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 e marked as METAL 2 is then deposited on top of the wafer in FIG. 7EI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7EJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 e on the back side of the wafer is then formed in FIG. 7EK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 e marked as METAL 3 is formed on the back side of the wafer in FIG. 7EL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of multiple n-type epi-grown layers in FIG. 7EC with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. On top of the N+ substrate 701 e, an N− drift layer 702 e can be epi-grown for serving as a drift/blocking layer. On top of the N− drift layer, a number of n-type epilayers can be grown to form an N+ region 704 e as a whole which consists of a set of sub n-type regions where each sub region is defined by different doping concentration and thickness and all sub regions are interconnected. On top of the buried N+ region, an N− layer can be formed which reaches to the surface of the SIC wafer 702 e.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 705 e, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7ED. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A set of multiple ion implantation steps with a p-type impurity 706 e such as aluminum and/or boron is performed in FIG. 7EE to form a set of multiple P+ wells 707 e in FIG. 7EF. The set of multiple ion implantation steps with the p-type species forms a set of sub p-type regions 707 e in FIG. 7EF where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The P+ region 707 e is formed by multiple P sub-regions. The bottoms of the set of multiple P+ wells 707 e are formed such that they are above the bottom of the N+ region 704 e. In the embodiments herein, the depth of the set of multiple P+ wells is less than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7EF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 e is removed by dry or wet etching process in FIG. 7EG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 e marked as METAL 1 directly on the wafer surface in FIG. 7EH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 e marked as METAL 2 is then deposited on top of the wafer in FIG. 7EI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7EJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 e on the back side of the wafer is then formed in FIG. 7EK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 e marked as METAL 3 is formed on the back side of the wafer in FIG. 7EL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

FIG. 7FA to FIG. 7FL describes the process of manufacturing the structure shown in FIG. 6F. The manufacturing process of the device includes preparing a SiC wafer in FIG. 7FA which consists of a highly conductive N+ substrate 701 f and an N− drift region 702 f, where the N− drift region is typically epi-grown. The N− drift region 702 f is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, a set of multiple ion implantation steps with an n-type species 703 f such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 7FB. The set of multiple ion implantation steps with the n-type species forms a set of sub n-type regions 704 f in FIG. 7FC where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The interconnected sub regions consist of the N+ region as a whole. The edge termination which is not shown needs to be masked during the set of n-type ion implantation steps. It is important to note that the n-type ion implantation steps 703 f needs to be performed in such a fashion that the N+ region 704 f is completely buried inside the N− drift region in FIG. 7FC. The ion implantation steps should form the N+ region 704 f where the top of the N+ region is physically off from the wafer surface.

A patterned mask 705 f, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7FD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A set of multiple ion implantation steps with a p-type impurity 706 f such as aluminum and/or boron is performed in FIG. 7FE to form a set of multiple P+ wells 707 f in FIG. 7FF. The set of multiple ion implantation steps with the p-type species forms a set of sub p-type regions 707 f in FIG. 7FF where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The P+ region 707 f is formed by multiple P sub-regions. The bottoms of the set of multiple P+ wells 707 f are formed such that they are below the bottom of the N+ region 704 f. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7FF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 f is removed by dry or wet etching process in FIG. 7FG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 f marked as METAL 1 directly on the wafer surface in FIG. 7FH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 f marked as METAL 2 is then deposited on top of the wafer in FIG. 7FI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7FJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 f on the back side of the wafer is then formed in FIG. 7FK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 f marked as METAL 3 is formed on the back side of the wafer in FIG. 7FL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of multiple n-type epi-grown layers in FIG. 7FC with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. On top of the N+ substrate 701 f, an N− drift layer 702 f can be epi-grown for serving as a drift/blocking layer. On top of the N− drift layer, a number of n-type epilayers can be grown to form an N+ region 704 f as a whole which consists of a set of sub n-type regions where each sub region is defined by different doping concentration and thickness and all sub regions are interconnected. On top of the buried N+ region, an N− layer can be formed which reaches to the surface of the SIC wafer 702 f.

When the SiC wafer with the aforementioned epi structure is prepared, a patterned mask 705 f, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 7FD. The patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A set of multiple ion implantation steps with a p-type impurity 706 f such as aluminum and/or boron is performed in FIG. 7FE to form a set of multiple P+ wells 707 f in FIG. 7FF. The set of multiple ion implantation steps with the p-type species forms a set of sub p-type regions 707 f in FIG. 7FF where each sub region is defined by the dotted line in the schematic for indicating the top and bottom of the sub region and all sub regions are interconnected. The P+ region 707 f is formed by multiple P sub-regions. The bottoms of the set of multiple P+ wells 707 f are formed such that they are below the bottom of the N+ region 704 f. In the embodiments herein, the depth of the set of multiple P+ wells is greater than the depth of the N+ region. The set of multiple P+ wells leads to a P+ region as a whole in FIG. 7FF. The edge termination region which is not shown may be formed by the p-type ion implantation step. The patterned mask 705 f is removed by dry or wet etching process in FIG. 7FG. This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 708 f marked as METAL 1 directly on the wafer surface in FIG. 7FH. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 709 f marked as METAL 2 is then deposited on top of the wafer in FIG. 7FI and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 7FJ. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 710 f on the back side of the wafer is then formed in FIG. 7FK. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 711 f marked as METAL 3 is formed on the back side of the wafer in FIG. 7FL. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

The advantage of the device structures shown in embodiments of FIG. 6A to FIG. 6F over those in FIG. 2A and FIG. 4 is that the doping concentration of the sub-regions can be appropriately fine-tuned to realize more optimum trade-off between the reverse leakage current and on-state voltage drop. In one implementation, the doping concentration in the n-type sub-regions farther away from the SiC surface can be made progressively higher, which may benefit from lower conduction losses. In another implementation, the doping concentration in the p-type sub-regions farther away from the SiC surface can be made progressively lower, which may enable better blocking characteristics.

In the device of shown in FIG. 8 is the cross-sectional schematic of SiC MPS diode. The key regions of this device are an N+ substrate 801 at the bottom which gives mechanical support of the wafer and is ˜350 μm-thick. An N− drift region 802 which is usually an epi layer and is on top of the N+ substrate. There are two different types of P+ wells depending on their depths which are in comparison to the depth of the N+ layer. The P+ wells 804 whose depths are less than the depth of the N+ layer 803 is called a first P+ wells while other P+ wells 805 whose depths are greater than the depth of the N+ layer 803 is called a second P+ wells. The N+ layer 803 is formed in such a way to completely surround the first P+ wells 804 and allow the second P+ wells 805 to completely penetrate the N+ layer which exposes the bottom of the second P+ wells 805 to the N− drift region 802. The device has a first metal layer 806 denoted as METAL 1, which is the Schottky metal to an n-type SiC semiconductor region and forms Schottky contact to its underlying n-type regions. The device has a second metal layer 807 denoted as METAL 2 on the front side of the wafer which is in contact with the METAL 1. METAL 2 is often called “power metal” and is usually in Aluminum. There is a silicide layer 808 under the bottom of the N+ substrate. There is a third metal layer 809 denoted as METAL 3 under the back side of the wafer which is in contact with the silicide layer.

The device shown in FIG. 8 has a N+ region 803 which is interspersed between a set of two different types of P+ wells depending on their depths which are in comparison to the depth of the N+ layer. The P+ wells 804 whose depths are less than the depth of the N+ layer 803 is called a first P+ wells while other P+ wells 805 whose depths are greater than the depth of the N+ layer 803 is called a second P+ wells. The N+ layer 803 is formed in such a way to completely surround the first P+ wells 804 and allow the second P+ wells 805 to completely penetrate the N+ layer which exposes the bottom of the second P+ wells 805 to the N− drift region 802. The physical separation of the N+ region from a SiC wafer surface is a critical feature of the embodiment described herein and distinguishes it from other similar inventions. A part of the SiC wafer which is in contact with a Schottky metal 806 denoted as METAL 1 and is an n-type semiconductor has the same doping concentration of the N− drift 802. In the embodiment described herein, the doping concentration of the n-type SiC semiconductor which is in direct contact with the Schottky metal 806 labeled METAL 1 is critical for reducing the strength of the electric field at the wafer surface, during the high-voltage blocking mode of operation of the SiC MPS diode.

FIG. 9A to FIG. 9P describes the process of manufacturing the structure shown in FIG. 8. The manufacturing process of the device includes preparing a SiC wafer in FIG. 9A which consists of a highly conductive N+ substrate 901 and an N− drift region 902, where the N− drift region is typically epi-grown. The N− drift region 902 is designed in such a way that the doping concentration and thickness of the N− drift region are primarily selected based on the required blocking performance. When the SiC wafer is prepared, an ion implantation step with an n-type species 903 such as nitrogen and/or phosphorus is performed onto the active region of the device in FIG. 9B forming an N+ region within the N− drift region. The edge termination which is not shown needs to be masked during the n-type ion implantation step. It is important to note that the n-type ion implantation step 903 needs to be performed in such a fashion that the N+ region 904 is completely buried inside the N− drift region in FIG. 9C. The ion implantation step should form the N+ region 904 where the top of the N+ region is physically off from the wafer surface.

A first patterned mask 905, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 9D. The first patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A first p-type ion implantation step with a p-type impurity 906 such as aluminum and/or boron is performed in FIG. 9E to form a first set of multiple P+ wells 907 in FIG. 9F. The depths of the first set of multiple P+ wells 907 are formed such that they are completely surrounded by the N+ region 904. In the embodiments herein, the depth of the first set of multiple P+ wells is less than the depth of the N+ region. The first patterned mask 909 is removed by dry or wet etching process in FIG. 9G.

After the first patterned mask is removed, a second patterned mask 908, which preferably is a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 9H. The second patterned 908 mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A second p-type ion implantation step 909 with a p-type impurity such as aluminum and/or boron is performed in FIG. 9I in such a way to form a second multiple P+ wells where the bottom of the second set of multiple P+ wells 910 is below the bottom of the N+ region 904 in FIG. 9J. The first set of multiple P+ wells and the second set of multiple P+ wells lead to a P+ region as a whole. The edge termination region which is not shown may be formed by the first p-type ion implantation step and/or the second p-type ion implantation step. The second patterned mask 908 is removed by dry or wet etching process in FIG. 9K.

This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 911 marked as METAL 1 directly on the wafer surface in FIG. 9L. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 912 marked as METAL 2 is then deposited on top of the wafer in FIG. 9M and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 9N. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 913 on the back side of the wafer is then formed in FIG. 9O. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 914 marked as METAL 3 is formed on the back side of the wafer in FIG. 9P. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

Another method to fabricate this embodiment is to use a SiC wafer with multiple n-type epi-grown layers to start with. In this case, the SiC wafer consists of three n-type epi-grown layers in FIG. 9C with different doping concentrations and thicknesses and the N+ substrate at the bottom of the SiC wafer. The three n-type epi-grown layers should be formed in such a way that an N-layer 902 is meeting a device side of the wafer and an N+ layer 904 is positioned right underneath the N− layer, where the N+ layer is on top of a second N− layer also labeled 902 which serves as a drift region and the second N− layer is positioned on top of the N+ substrate 901.

When the SiC wafer with the aforementioned epi structure is prepared, a first patterned mask 905, which is preferably a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 9D. The first patterned mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A first p-type ion implantation step with a p-type impurity 906 such as aluminum and/or boron is performed in FIG. 9E to form a first set of multiple P+ wells 907 in FIG. 9F. The depths of the first set of multiple P+ wells 907 are formed such that they are completely surrounded by the N+ region 904. In the embodiments herein, the depth of the first set of multiple P+ wells is less than the depth of the N+ region. The first patterned mask 909 is removed by dry or wet etching process in FIG. 9G.

After the first patterned mask is removed, a second patterned mask 908, which preferably is a hard mask made of such as an oxide, a nitride, a polysilicon layer, or a combination of these, is formed on the wafer surface in FIG. 9H. The second patterned 908 mask must be thick enough to completely block any high energy impurities during the subsequent ion implant step. A second p-type ion implantation step 909 with a p-type impurity such as aluminum and/or boron is performed in FIG. 9I in such a way to form a second multiple P+ wells where the bottom of the second set of multiple P+ wells 910 is below the bottom of the N+ region 904 in FIG. 9J. The first set of multiple P+ wells and the second set of multiple P+ wells lead to a P+ region as a whole. The edge termination region which is not shown may be formed by the first p-type ion implantation step and/or the second p-type ion implantation step. The second patterned mask 908 is removed by dry or wet etching process in FIG. 9K.

This is followed by a process step to electrically activate all the implanted impurity species by coating the wafer with a suitable coating material such as a carbon cap and annealing at high temperature such as 1700° C. The active region is then defined by forming a field oxide layer on the entire wafer surface and clearing out a part of the field oxide where the conduction current needs to flow for on-state operation of the device.

The Schottky contact is formed on the wafer surface by depositing a Schottky metal 911 marked as METAL 1 directly on the wafer surface in FIG. 9L. The deposited Schottky metal layer is then patterned by using dry etching, wet etching, or lift-off process and annealed at a certain temperature for a certain amount of time by using a furnace or RTA. The thermal budget of the annealing step after the Schottky metal deposition needs to be carefully designed and controlled because it directly affects the barrier height of the Schottky contact. A first pad metal 912 marked as METAL 2 is then deposited on top of the wafer in FIG. 9M and patterned by dry etching, wet etching, or lift-off. The first pad metal can be of Aluminum/Aluminum-based alloy. The wafer is then thinned from its back side until its thickness reaches to a target thickness of 100˜200 μm in FIG. 9N. The thickness may be further reduced in the future when the wafer thinning technology improves and provides the target thickness less than the aforementioned 100˜200 μm. The wafer thinning can be accomplished by CMP, wet etching, dry etching, or a combination of the aforementioned grinding techniques with a proper protective coating at the front side of the wafer.

A silicide region 913 on the back side of the wafer is then formed in FIG. 90. The silicide region is required to form a good ohmic contact on the back side of the wafer. The silicide region is formed by depositing ohmic metal stack and annealing the wafer by using a laser annealing technique as an example. A second pad metal 914 marked as METAL 3 is formed on the back side of the wafer in FIG. 9P. The second pad metal can be of Aluminum or Aluminum-based alloy. After the second pad metal step is finished, a protective coating process step may be followed on top of the wafer to form a moisture barrier.

The device of embodiment shown in FIG. 8 combines the desirable features of the devices shown in embodiments described in FIG. 2A and FIG. 4. In the embodiment described in FIG. 8 the first P+ wells that are formed deeper than the N+ layer may serve to inject minority carriers into the N+ drift layer under surge current conditions and the second P+ wells that are completely enclosed by the N+ layer reduce the spreading resistance of the diode current as it spreads vertically from the region in-between the p-type wells to the N− drift layer. The device of embodiment is constructed with both first and second type P+ wells to exploit both aforementioned benefits of the first and second P+ wells, respectively. The proportion of the first and second type P+ wells may be appropriately adjusted to yield a diode that is either tuned for lower conduction losses or one that is designed for withstanding higher surge currents.

FIG. 10A shows blocking performances of the devices of this invention with varying ratio of W1/D1 that ranges from 1.0 to 3.0 and blocking performance of the device of the prior art with a fixed ratio of W1/D1 which is equal to 3.0. FIG. 10A shows the statistical distribution of the measured blocking voltages of the devices described the various embodiments herein. With a targeted breakdown voltage for these devices at 650 V, the median value of each distribution is highlighted. A leakage current of 10 μA is used as a criteria to measure the blocking voltages and the blocking voltages is greater than the target of 650 V. The measured blocking voltages of the devices of this invention whose ratio of W1/D1 is varied from 1.0 to 2.5 are greater than 650 V. The case when the ratio of W1/D1 equals to 3.0, however, shows its blocking voltage distribution spreads out from 500 V to 730 V where a large portion of the distribution is below the targeted 650 V.

FIG. 10B shows the blocking I-V curves of the devices of this invention with varying ratio of W1/D1 (i.e., 2.0, 2.5 and 3.0). FIG. 10B shows that all the devices with the exception of the device of this invention where the radio of W1/D1 equals to 3.0 block at 650 V with their leakage current kept less than 10 μA which is used as the blocking criterion as mentioned earlier. At 650 V, the device of this invention with the ratio of W1/D1 that equals to 3.0 shows high leakage current of 22 μA which is above 10 μA. Due to the high leakage current density of the device of this invention with the ratio of W1/D1 of 3.0 at the targeted rated voltage of 650 V, the device of this invention with the ratio of W1/D1 of 3.0 is not adequate for the use. Based on the discussion on the blocking performance, it is clear that the ratio of W1/D1 of the devices of this invention should be less than 3.0 to meet the targeted blocking voltage of 650 V.

FIG. 10C is the forward I-V curves of the devices of this invention with varying ratio of W1/D1 that ranges from 2.0 to 3.0. FIG. 10C shows that increasing the ratio of W1/D1 from 2.0 to 3.0 decreases the forward conduction loss. The device of this invention of the ratio of W1/D1 of 3.0 shows the best forward conduction performance, however due to the aforementioned poor blocking performance of the device, the device is not suitable for the use of 650 V applications.

FIG. 10D shows the performance of differential specific on-resistances of the devices of this invention with varying ratio of W1/D1 that ranges from 2.0 to 3.0. FIG. 10D shows the statistical distribution of the measured differential specific on-resistances of the devices of this invention. The median value of each distribution is highlighted in bold. Clearly, the differential specific on-resistance drops as the ratio of W1/D1 increases. This trend agrees with the observation made on the forward I-V curves in FIG. 10c . Even though the device of this invention of the ratio of W1/D1 of 3.0 shows the best forward conduction performance, the device should not be considered to be appropriate due to its poor blocking performance as mentioned earlier.

The devices of this invention show improvement in both the forward and blocking performance is only valid when the ratio of W1/D1 is less than 3.0.

Other embodiments are also within the scope of the following claims.

Power DMOSFETs

A cross-sectional schematic of a power MOSFET structure comprising N layer is shown in FIG. 11A according to an embodiment. FIG. 11A shows a cross-sectional device structure of a double-implanted MOSFET or DMOSFET. The DMOSFET structure comprises a N+ substrate 1101, N-Drift (or Voltage Blocking) Region 1102, p-well Region 1109, N+ source 1108 and P+ Body (or p-well contact) regions 1104. A silicide layer 1107 is formed on the N+ and P+ regions to form the source ohmic contact. The gate dielectric 1110 and gate metal layers 1111 are successively formed on the SiC surface 1107, which together constitute the metal-oxide-semiconductor (MOS) structure. An inter-level dielectric or ILD layer 1112 separates the Gate metal 1 111 from the metal 1 layer 1113 which contacts the interspersed Source ohmic contact regions.

An additional n-type layer 1103 is formed that is not in contact with the gate dielectric layer 1110. In other words, the additional n-type layer 1103 is formed such that in vertical direction, it is completely enclosed by the N-drift layer 1105. The doping concentration of the n-type layer 1103 should be higher than that of the N-drift layer 1105. The doping concentration of the n-type layer 1103 could be in the range of 1E15 cm-3 to 1E19 cm-3. Except for the gate dielectric layer 1110 in DMOSFET, the design of this n-type layer follows identical considerations. In this embodiment, the vertical extent of this n-type layer 1103 is greater than the p-well region 1109, but the n-type layer 1103 could also be designed such that its vertical extent is smaller than the vertical extent of the p-well region. FIGS. 14A to 14C show the vertical extent of n-type layer 1103 with respect to the vertical extent of the p-well region 1109. In an embodiment, according to FIG. 14A, the n-type layer 1103 vertical extent is smaller than the vertical extent of the p-well region 1109. In another embodiment, according to FIG. 14B, the vertical extent of n-type layer 1103 is greater than the vertical extent of the p-well region 1109. In another embodiment, according to FIG. 14C, the n-type layer 1103 vertical extent is greater than the vertical extent of the p-well region 1109 but lateral extent is smaller and is non-continuous or interrupted i.e. having gaps.

Method of fabrication of Power DMOSFETs: FIGS. 16A to 16D depicts the process steps for fabrication of Power DMOSFET. As depicted in FIG. 16A, the starting silicon carbide wafer comprises a N-drift layer 1602 formed on top of a N+ substrate 1601. As depicted in FIG. 16B, the N-Layer 1603 can be formed either by ion-implantation or by epitaxial growth. If the N-layer 1603 is formed using epitaxial growth, this needs to be followed by the growth of an additional n-type layer 1603 with the same doping concentration as the N-drift layer 1602. In case of ion-implantation, the n-type layer 1603 may be formed using either Nitrogen or Phosphorus as the n-type implanted species. The implant energy may be in the range of 50 keV to 4 MeV and the implanted dose may be in the range of 1E10 cm-2 to 1E14 cm-2. An example of the n-type 1603 formed using ion-implantation is shown in the FIG. 12. Notice that the n-type layer 1603 is completely buried within the N-drift layer 1602. Following this, appropriate ion-implantation steps may be utilized to realize the p-well 1609, N+ source 1608 and P+ regions 1604. FIGS. 16C and 16D shows the remainder of the steps for the DMOSFET fabrication which include post-implantation annealing, gate dielectric 1610 and gate metal 1611 formation, silicide 1607 formation for ohmic contacts, ILD layer 1612 and final pad metal layer deposition 1613.

The incorporation of the additional n-type layer into the DMOSFET structures enables a better trade-off between reducing the on-state resistance of the device and maintaining a low electric field in the gate dielectric layer. The DMOSFET device structure can result in high electric field concentration at the corner of the P-well region, which results in a high electric field in the gate oxide layer, especially during high drain bias (blocking mode) operation. The high critical electric fields for breakdown in 4H—SiC (≈3 MV/cm) results in a very high (>5 MV/cm) electric field in the gate oxide. Fowler-Nordheim tunneling currents are observed at such high electric fields in the gate oxide, which can result in trapped charge in the gate oxide, which leads to poor device reliability. Similar n-type layers (called current spreading layers) are typically utilized in other DMOSFET structures reported in the literature, but the distinguishing feature of this invention is that the N-layer is completely buried within the N-drift layer. This device structure enables a higher reduction of the electric field in the gate dielectric layer without compromising the on-state resistance. As it will be apparent to those in the field of the invention, the proposed approach to realize additional n-type doping between the P-well regions (also called the JFET region) may be used in combination with other design features such as JFET width reduction for electric field reduction. The maximum electric fields in the gate dielectric layer may be reduced below 3 MV/cm and for some implementations even below 2.5 MV/cm using the teachings of this invention, which presages significantly higher device reliability.

Vertical JFETs

A cross-sectional schematic of a vertical JFET structure is shown in FIG. 11B according to an embodiment. FIG. 11B shows a cross-sectional schematic of a vertical JFET. The JFET comprises a N+ substrate 1120, N− Drift (or Voltage Blocking) Region 1121, P+ gate Region 1123, N+ source 1126, ohmic contact and pad metallization layers. An inter-level dielectric or ILD layer 1124 separates the Gate Metal from the metal 1 layer 1127 which contacts the interspersed Source ohmic contact regions.

In this application, an additional n-type layer 1122 is formed that is not in contact with the N+ source layer 1126. In other words, the additional n-type layer 1122 is formed such that in in vertical direction, it is completely enclosed by the N-drift layer 1121. The doping concentration of the n-type layer 1122 should be higher than that of the N-drift layer 1121. The doping concentration of the n-type layer could be in the range of 1E15 cm-3 to 1E19 cm-3. Except for the N+ source layer 1126 in vertical JFET, the design of this n-type layer follows identical considerations. In this embodiment, the vertical extent of this n-type layer 1112 is smaller the P+ gate region 1123, but the n-type layer 1112 could also be designed such that its vertical extent is larger than the vertical extent of the P+ gate region 1123. FIGS. 13A to 13C show the vertical extent of n-type layer with respect to the vertical extent of the P+ gate region. In an embodiment according to FIG. 13A the n-type layer 1303 vertical extent is smaller than the vertical extent of the P+ gate region 1304. In another embodiment, according to FIG. 13B, the n-type layer 1303 vertical extent is greater than the vertical extent of the P+ gate region 1304. In another embodiment, according to FIG. 13C, the n-type layer 1303 vertical extent is greater than the vertical extent of the P+ gate region 1304 but lateral extent is smaller and is non-continuous or interrupted i.e. having gaps.

Method of fabrication of Vertical JFETs: FIGS. 15A to 15E depicts the process steps for fabrication of Vertical JFET. As depicted in FIGS. 15A and 15B, the starting silicon carbide wafer comprises a N-drift layer 1502 formed on top of a N+ substrate 1501. As depicted in FIG. 15C to 15E, the n-type Layer 1503 can be formed either by ion-implantation or by epitaxial growth. If the n-type layer 1503 is formed using epitaxial growth, this needs to be followed by the growth of an additional n-type layer with the same doping concentration as the N-drift layer 1502. In case of ion-implantation, the n-type layer 1503 may be formed using either Nitrogen or Phosphorus as the n-type implanted species. The implant energy for the n-type layer 1503 may be in the range of 50 keV to 4 MeV and the implanted dose may be in the range of 1E10 cm-2 to 1E14 cm-2. Appropriate ion-implantation steps may be utilized to realize the P+ gate 1504, N+ source regions 1508. The N+ source region 1508 may also be formed using epitaxial growth, as part of the starting wafer. The remainder of the steps for the JFET fabrication include post-implantation annealing, silicide formation 1507 for gate and source ohmic contacts, ILD layer 1506 formation and final pad metal layer 1509 deposition.

The incorporation of the additional n-type layer into the JFET structure enables a better trade-off between reducing the on-resistance of the device and maintaining a high enough gate threshold voltage close to zero volts, in case of a normally-ON JFET device. The n-type layer is strategically placed in the so-called channel region of the JFET and we will refer to this doping concentration as Nch or the channel doping concentration.

For the design of normally-on and normally-off type JFET, a simplified one-sided N− channel p-n JFET is considered. The channel width between the P+ gates is W_(ch), and the induced depletion region width for the one-sided p+n junction is d when the drain-to-source voltage is zero. Based on these assumptions, the depletion width is given by Equation (1).

$\begin{matrix} {d = \frac{2ɛ_{sic}{ɛ_{o}\left( {V_{bi} - V_{GS}} \right)}}{eN_{ch}}} & {{Equation}\mspace{14mu}(1)} \end{matrix}$

where VGS is the gate-to-source voltage (a negative voltage for a reverse-biased PN junction), Vbi is the built-in potential barrier, and Nch is the channel doping concentration. So called pinch-off condition is reached when the channel is fully depleted (d=W_(ch)) and we can write Equation (2).

$\begin{matrix} {W_{ch} = \left( \frac{2ɛ_{sic}ɛ_{o}V_{po}}{eN_{ch}} \right)^{\frac{1}{2}}} & {{Equation}\mspace{14mu}(2)} \end{matrix}$

where Vpo is the internal pinch-off voltage. This voltage is not the gate-to-source voltage to obtain the pinch-off condition. From the above equations, the pinch-off voltage (threshold voltage) is defined by Equation (3) and Equation (4).

$\begin{matrix} {{V_{bi} - V_{p{({th})}}} = {\left. v_{po}\rightarrow V_{p{({th})}} \right. = {V_{bi} - V_{po}}}} & {{Equation}\mspace{14mu}(3)} \\ {V_{th} = {V_{bi} - \frac{{eN}_{ch}W_{ch}^{2}}{2ɛ_{sic}ɛ_{o}}}} & {{Equation}\mspace{14mu}(4)} \end{matrix}$

For 4H—SiC material, the built-in potential is approximately 2.5 V at room temperature. The highest threshold voltage in the forward direction is given by the built-in potential of the gate-to-source junction in the absence of bipolar injection. The lowest threshold voltage in the reverse direction is given by V_(po)>=V_(bi). Equation (4) is the basis for designing the channel of the JFET. For a channel width, W_(ch), and threshold voltage, Vth, the channel doping (N_(ch)) has to be chosen according to Equation (4). The above analysis assumes a uniform JFET channel. In case of a non-uniform JFET channel that is typically realized in practice as shown in FIG. 11B, the n-type channel doping can be designed in a non-uniform manner. The highest doping in this layer can be advantageously realized, where the JFET channel is at its narrowest, with a lower doping in other regions of the JFET channel. Ion-implantation enables the realization of such arbitrary doping profiles.

Although, various embodiments which incorporate the teachings described in detail herein, those skilled in the art can readily devise many other varied embodiments that still incorporate these teachings. For example, a complementary SiC diode or transistor device with a P+ substrate, P− drift layer and multiple N+ islands interspersed with the P+ regions source can be created. The embodiments described are all applicable to the complementary SiC diodes or transistors as well.

In the embodiments and claims herein, the terms “first conductivity type region” and “second conductivity type region” are used to describe n-type and p-type regions respectively for a n-type device. For a p-type device “first conductivity type region” and “second conductivity type region” are used to describe p-type and n-type regions respectively.

All documents (patents, patent publications or other publications) mentioned in the specification are incorporated herein in their entirety by reference. 

What is claimed is:
 1. A semiconductor component, comprising a semiconductor body of a first conductivity type comprising a voltage blocking layer; and islands of a second conductivity type on a contact surface; and a first conductivity type layer comprising the first conductivity type not in contact with a gate dielectric layer or a source layer that is interspersed between the islands of the second conductivity type.
 2. The semiconductor component of claim 1, wherein the first conductivity type layer comprises a n-type layer and is formed in vertical direction such that it is completely enclosed by the voltage blocking layer comprises a n-type drift layer.
 3. The semiconductor component of claim 1, wherein doping concentration of the n-type layer is higher than that of the voltage blocking layer comprises a n-type drift layer.
 4. The semiconductor component of claim 1, wherein doping concentration of the n-type layer is in a range of 1E15 cm⁻³ to 1E19 cm⁻³.
 5. The semiconductor component of claim 1, wherein the first conductivity type layer comprises a n-type layer and is not in contact with the gate dielectric layer and the second conductivity type comprises a p-well region in a double-implanted MOSFET or a DMOSFET.
 6. The semiconductor component of claim 5, wherein a structure of the DMOSFET comprising the second conductivity type which comprises a p-well region, the gate dielectric layer, the metal layer comprises metal 1 layer on the voltage blocking layer which comprises n-drift layer further comprises a N+ substrate, gate metal layer and an interspersed N+ region and a P+ region forming a source ohmic contact region.
 7. The semiconductor component of claim 6, wherein an inter-level dielectric or an ILD layer separates the gate metal from the metal 1 layer which contacts the source ohmic contact regions.
 8. The semiconductor component of claim 5, wherein the n-type layer whose vertical extent is greater than the vertical extent of the p-well region.
 9. The semiconductor component of claim 5, wherein the n-type layer whose vertical extent is smaller than the vertical extent of the p-well region.
 10. The semiconductor component of claim 5, wherein the n-type layer whose vertical extent is greater than the vertical extent of the p-well region, but lateral extent is smaller and is non-continuous or interrupted.
 11. The semiconductor component of claim 1, wherein the first conductivity type layer comprises a n-type layer and is not in contact with the source layer comprises a N+ source layer and the second conductivity type comprises a P+ gate region in a vertical junction field effect transistor (JFET).
 12. The semiconductor component of claim 11, wherein a structure of the vertical junction field effect transistor (JFET) comprising the second conductivity type that comprises a P+ gate region, the N+ source, further comprises a N+ substrate, an interspersed source ohmic contact region and a pad metallization layer comprises a metal 1 layer.
 13. The semiconductor component of claim 12, wherein an inter-level dielectric or ILD layer separates the P+ gate region from the metal 1 layer which contacts the interspersed source ohmic contact regions.
 14. The semiconductor component of claim 11, wherein the n-type layer whose vertical extent is greater than the vertical extent of the P+ gate region.
 15. The semiconductor component of claim 11, wherein the n-type layer whose vertical extent is smaller than the vertical extent of the P+ gate region.
 16. The semiconductor component of claim 11, wherein the n-type layer whose vertical extent is greater than the vertical extent of the P+ gate region, but lateral extent is smaller and is non-continuous or interrupted.
 17. A method, comprising: preparing a silicon carbide wafer comprising a N-drift layer formed on top of a N+ substrate; and forming an n-type layer, and fabricating a semiconductor component, wherein the n-type layer is formed such that it is completely buried within the N-drift layer.
 18. The method of claim 17, wherein the n-type layer is formed using epitaxial growth, followed by growing an additional n-type layer with a same doping concentration as the N-drift layer.
 19. The method of claim 17, wherein the n-type layer is formed by ion-implantation of Nitrogen or Phosphorus as a n-type implanted species.
 20. The method of claim 17, wherein an implant energy is in a range of 50 keV to 4 MeV and an implanted dose is in a range of 1E10 cm⁻² to 1E14 cm⁻². 